We evolve virtual photon parton densities up to the SUSY threshold and higher using coupled inhomogeneous DGLAP differential equations. Reliable input parameterizations were available from the c-quark threshold. Limited $P^2$ ( target photon virtuality ) dependence is observed. The difference to the photon structure function is shown to be significant with the introduction of SUSY dependent splitting functions. A negligible difference is observed by letting the gluino mass enter after the squark mass. An effort is made to include the squark threshold effect in such a way that both the renormalization group equations are satisfied and the perturbative calculation is reproduced.